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Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy.

Bibliographic Details
Main Author:	Chang, Jui-Che.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2022.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Licentiate Thesis Series
Subjects:	Electronic books.
Online Access:	Click to View

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