Cathodic Arc Synthesis of Ti-Si-C-N Thin Films : Plasma Analysis and Microstructure Formation.

Bibliographic Details
Main Author: Eriksson, Anders.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2012.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Dissertations Series
Subjects:
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