APA Citation

Chang, J. (2022). Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy. Linköping: Linkopings Universitet.

Chicago Style Citation

Chang, Jui-Che. Metastable Orthorhombic Ta 3 N 5 Thin Films Grown By Magnetron Sputter Epitaxy. Linköping: Linkopings Universitet, 2022.

MLA Citation

Chang, Jui-Che. Metastable Orthorhombic Ta 3 N 5 Thin Films Grown By Magnetron Sputter Epitaxy. Linköping: Linkopings Universitet, 2022.

Warning: These citations may not always be 100% accurate.