Growth and Characterization of Amorphous TiAlSiN and HfAlSiN Thin Films.

Bibliographic Details
Main Author: Fager, Hanna.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2012.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Thesis Series
Subjects:
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