Metastable Orthorhombic Ta 3 N 5 Thin Films Grown by Magnetron Sputter Epitaxy.
| Main Author: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2022.
|
| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Licentiate Thesis Series
|
| Subjects: | |
| Online Access: | Click to View |