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Energy-Efficient Physical Vapor Deposition of Transition Metal Nitride Thin Films.

Bibliographic Details
Main Author:	Honnali, Sanath Kumar.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2024.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Licentiate Thesis Series
Subjects:	Electronic books.
Online Access:	Click to View

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