Table of Contents: Energy-Efficient Physical Vapor Deposition of Transition Metal Nitride Thin Films.

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Energy-Efficient Physical Vapor Deposition of Transition Metal Nitride Thin Films.

Bibliographic Details
Main Author:	Honnali, Sanath Kumar.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2024.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Licentiate Thesis Series
Subjects:	Electronic books.
Online Access:	Click to View

Table of Contents:

Intro
Abstract
Populärvetenskaplig sammanfattning
Preface
List of included publications
Acknowledgments
Contents
Chapter 1 1. Introduction
Chapter 2 2. Thin Films
Chapter 3 3. Materials systems
Chapter 4 4. Thin film deposition
Chapter 5 5. Characterization techniques
Chapter 6 6. Summary of appended papers
Chapter 7 7. Outlook
References
Papers.