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|a Honnali, Sanath Kumar.
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|a Energy-Efficient Physical Vapor Deposition of Transition Metal Nitride Thin Films.
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|a 1st ed.
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|a Linköping :
|b Linkopings Universitet,
|c 2024.
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|c {copy}2024.
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|a 1 online resource (84 pages)
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|a text
|b txt
|2 rdacontent
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|a computer
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|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a Linköping Studies in Science and Technology. Licentiate Thesis Series ;
|v v.2000
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|a Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- List of included publications -- Acknowledgments -- Contents -- Chapter 1 1. Introduction -- Chapter 2 2. Thin Films -- Chapter 3 3. Materials systems -- Chapter 4 4. Thin film deposition -- Chapter 5 5. Characterization techniques -- Chapter 6 6. Summary of appended papers -- Chapter 7 7. Outlook -- References -- Papers.
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|a Description based on publisher supplied metadata and other sources.
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|a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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|a Electronic books.
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|i Print version:
|a Honnali, Sanath Kumar
|t Energy-Efficient Physical Vapor Deposition of Transition Metal Nitride Thin Films
|d Linköping : Linkopings Universitet,c2024
|z 9789180757027
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| 797 |
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|a ProQuest (Firm)
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| 830 |
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|a Linköping Studies in Science and Technology. Licentiate Thesis Series
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| 856 |
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|u https://ebookcentral.proquest.com/lib/matrademy/detail.action?docID=31502917
|z Click to View
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