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Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.

Bibliographic Details
Main Author:	Paik, Ungyu.
Other Authors:	Park, Jea-Gun.
Format:	eBook
Language:	English
Published:	Milton : Taylor & Francis Group, 2009.
Edition:	1st ed.
Subjects:	Electronic books.
Online Access:	Click to View

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