Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
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| Format: | eBook |
| Language: | English |
| Published: |
Milton :
Taylor & Francis Group,
2009.
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| Edition: | 1st ed. |
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| Online Access: | Click to View |
| Physical Description: | 1 online resource (222 pages) |
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| ISBN: | 9781000023220 |