Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation Nanodevices.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Milton :
Taylor & Francis Group,
2009.
|
| Edition: | 1st ed. |
| Subjects: | |
| Online Access: | Click to View |