Deposition of Al-Doped ZnO Films by High Power Impulse Magnetron Sputtering.
| Main Author: | Mickan, Martin. |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2017.
|
| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
|
| Subjects: | |
| Online Access: | Click to View |
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