Deposition of Al-Doped ZnO Films by High Power Impulse Magnetron Sputtering.
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| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2017.
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| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Subjects: | |
| Online Access: | Click to View |
Table of Contents:
- Intro
- Abstract
- Populärvetenskapligsammanfattning
- Résumé étendu
- Preface
- Included papers and author's contribution
- Acknowledgements
- Abbreviations
- Contents
- Introduction
- Transparent conducting oxides
- The sputter deposition process
- Characterization methods
- Summary of the results
- Contributions and future work
- Bibliography
- Papers.