Deposition of Al-Doped ZnO Films by High Power Impulse Magnetron Sputtering.

Bibliographic Details
Main Author: Mickan, Martin.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2017.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Dissertations Series
Subjects:
Online Access:Click to View
Table of Contents:
  • Intro
  • Abstract
  • Populärvetenskapligsammanfattning
  • Résumé étendu
  • Preface
  • Included papers and author's contribution
  • Acknowledgements
  • Abbreviations
  • Contents
  • Introduction
  • Transparent conducting oxides
  • The sputter deposition process
  • Characterization methods
  • Summary of the results
  • Contributions and future work
  • Bibliography
  • Papers.