Silicon Oxynitride Thin Films Grown by Reactive HiPIMS.
Main Author: | Hänninen, Tuomas. |
---|---|
Format: | eBook |
Language: | English |
Published: |
Linköping :
Linkopings Universitet,
2015.
|
Edition: | 1st ed. |
Series: | Linköping Studies in Science and Technology. Thesis Series
|
Subjects: | |
Online Access: | Click to View |
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