Record Citations

APA Citation

Hänninen, T. (2015). Silicon Oxynitride Thin Films Grown by Reactive HiPIMS. Linköping: Linkopings Universitet.

Chicago Style Citation

Hänninen, Tuomas. Silicon Oxynitride Thin Films Grown By Reactive HiPIMS. Linköping: Linkopings Universitet, 2015.

MLA Citation

Hänninen, Tuomas. Silicon Oxynitride Thin Films Grown By Reactive HiPIMS. Linköping: Linkopings Universitet, 2015.

Warning: These citations may not always be 100% accurate.