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High-Resolution Characterization of TiN Diffusion Barrier Layers.

Bibliographic Details
Main Author:	Mühlbacher, Marlene.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2015.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Thesis Series
Subjects:	Electronic books.
Online Access:	Click to View

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