Time-Resolved CVD of Group 13-Nitrides.
Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
Linköping :
Linkopings Universitet,
2021.
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Edition: | 1st ed. |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Subjects: | |
Online Access: | Click to View |
Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig Sammanfattning
- Preface
- Acknowledgement
- Papers Included in the Thesis and Contribution
- Papers not Included in the Thesis
- Table of Contents
- Chapter 1 - Introduction
- Chapter 2 - ALD
- Chapter 3 - Precursors
- Chapter 4 - Group 13-Nitrides
- Chapter 5 - Thin film Deposition of Group 13-Nitrides
- Chapter 6 - Substrates and Crystal Growth
- Chapter 7 - Characterisation
- Chapter 8 - Contribution to the Field
- Chapter 9 - Outlook
- References
- Papers.