Time-Resolved CVD of Group 13-Nitrides.

Bibliographic Details
Main Author: Rouf, Polla.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2021.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Dissertations Series
Subjects:
Online Access:Click to View
Table of Contents:
  • Intro
  • Abstract
  • Populärvetenskaplig Sammanfattning
  • Preface
  • Acknowledgement
  • Papers Included in the Thesis and Contribution
  • Papers not Included in the Thesis
  • Table of Contents
  • Chapter 1 - Introduction
  • Chapter 2 - ALD
  • Chapter 3 - Precursors
  • Chapter 4 - Group 13-Nitrides
  • Chapter 5 - Thin film Deposition of Group 13-Nitrides
  • Chapter 6 - Substrates and Crystal Growth
  • Chapter 7 - Characterisation
  • Chapter 8 - Contribution to the Field
  • Chapter 9 - Outlook
  • References
  • Papers.