|
|
|
|
| LEADER |
02080nam a22003733i 4500 |
| 001 |
EBC6693082 |
| 003 |
MiAaPQ |
| 005 |
20240729202203.0 |
| 006 |
m o d | |
| 007 |
cr cnu|||||||| |
| 008 |
240729s2021 xx o ||||0 eng d |
| 020 |
|
|
|a 9789179296315
|q (electronic bk.)
|
| 035 |
|
|
|a (MiAaPQ)EBC6693082
|
| 035 |
|
|
|a (Au-PeEL)EBL6693082
|
| 035 |
|
|
|a (OCoLC)1266905220
|
| 040 |
|
|
|a MiAaPQ
|b eng
|e rda
|e pn
|c MiAaPQ
|d MiAaPQ
|
| 100 |
1 |
|
|a Rouf, Polla.
|
| 245 |
1 |
0 |
|a Time-Resolved CVD of Group 13-Nitrides.
|
| 250 |
|
|
|a 1st ed.
|
| 264 |
|
1 |
|a Linköping :
|b Linkopings Universitet,
|c 2021.
|
| 264 |
|
4 |
|c {copy}2021.
|
| 300 |
|
|
|a 1 online resource (73 pages)
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
| 490 |
1 |
|
|a Linköping Studies in Science and Technology. Dissertations Series ;
|v v.2148
|
| 505 |
0 |
|
|a Intro -- Abstract -- Populärvetenskaplig Sammanfattning -- Preface -- Acknowledgement -- Papers Included in the Thesis and Contribution -- Papers not Included in the Thesis -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - ALD -- Chapter 3 - Precursors -- Chapter 4 - Group 13-Nitrides -- Chapter 5 - Thin film Deposition of Group 13-Nitrides -- Chapter 6 - Substrates and Crystal Growth -- Chapter 7 - Characterisation -- Chapter 8 - Contribution to the Field -- Chapter 9 - Outlook -- References -- Papers.
|
| 588 |
|
|
|a Description based on publisher supplied metadata and other sources.
|
| 590 |
|
|
|a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
|
| 655 |
|
4 |
|a Electronic books.
|
| 776 |
0 |
8 |
|i Print version:
|a Rouf, Polla
|t Time-Resolved CVD of Group 13-Nitrides
|d Linköping : Linkopings Universitet,c2021
|
| 797 |
2 |
|
|a ProQuest (Firm)
|
| 830 |
|
0 |
|a Linköping Studies in Science and Technology. Dissertations Series
|
| 856 |
4 |
0 |
|u https://ebookcentral.proquest.com/lib/matrademy/detail.action?docID=6693082
|z Click to View
|
