Engineered Ion-Bombardment As a Tool in Thin Film Deposition.
Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
Linköping :
Linkopings Universitet,
2021.
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Edition: | 1st ed. |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Subjects: | |
Online Access: | Click to View |
Table of Contents:
- Intro
- Abstract
- Populärvetenskaplig sammanfattning
- Preface
- Included papers
- Contributions to the included papers
- Acknowledgements
- Contents
- 1. Introduction
- 2. Sputtering process
- 3. Thin film growth
- 4. Plasma characterization of ionic species
- 5. Material characterization
- 6. Summary and contribution to the field
- 7. Future outlook
- Bibiliography
- Papers.