Engineered Ion-Bombardment As a Tool in Thin Film Deposition.

Bibliographic Details
Main Author: Viloan, Rommel Paulo B.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2021.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Dissertations Series
Subjects:
Online Access:Click to View
Table of Contents:
  • Intro
  • Abstract
  • Populärvetenskaplig sammanfattning
  • Preface
  • Included papers
  • Contributions to the included papers
  • Acknowledgements
  • Contents
  • 1. Introduction
  • 2. Sputtering process
  • 3. Thin film growth
  • 4. Plasma characterization of ionic species
  • 5. Material characterization
  • 6. Summary and contribution to the field
  • 7. Future outlook
  • Bibiliography
  • Papers.