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02021nam a22003733i 4500 |
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|a 9789179296995
|q (electronic bk.)
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|a (MiAaPQ)EBC6607573
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|a (Au-PeEL)EBL6607573
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|a (OCoLC)1251441193
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|a MiAaPQ
|b eng
|e rda
|e pn
|c MiAaPQ
|d MiAaPQ
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|a Viloan, Rommel Paulo B.
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|a Engineered Ion-Bombardment As a Tool in Thin Film Deposition.
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|a 1st ed.
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|a Linköping :
|b Linkopings Universitet,
|c 2021.
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|c {copy}2021.
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|a 1 online resource (84 pages)
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a Linköping Studies in Science and Technology. Dissertations Series ;
|v v.2124
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|a Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Included papers -- Contributions to the included papers -- Acknowledgements -- Contents -- 1. Introduction -- 2. Sputtering process -- 3. Thin film growth -- 4. Plasma characterization of ionic species -- 5. Material characterization -- 6. Summary and contribution to the field -- 7. Future outlook -- Bibiliography -- Papers.
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| 588 |
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|a Description based on publisher supplied metadata and other sources.
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| 590 |
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|a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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|a Electronic books.
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|i Print version:
|a Viloan, Rommel Paulo B.
|t Engineered Ion-Bombardment As a Tool in Thin Film Deposition
|d Linköping : Linkopings Universitet,c2021
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| 797 |
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|a ProQuest (Firm)
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| 830 |
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|a Linköping Studies in Science and Technology. Dissertations Series
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| 856 |
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|u https://ebookcentral.proquest.com/lib/matrademy/detail.action?docID=6607573
|z Click to View
|
