Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
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| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2023.
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| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | Click to View |
| Physical Description: | 1 online resource (60 pages) |
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| ISBN: | 9789180752428 |