APA Citation

Li, X. (2023). Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation. Linköping: Linkopings Universitet.

Chicago Style Citation

Li, Xiao. Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering By Employing Metal Ion Irradiation. Linköping: Linkopings Universitet, 2023.

MLA Citation

Li, Xiao. Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering By Employing Metal Ion Irradiation. Linköping: Linkopings Universitet, 2023.

Warning: These citations may not always be 100% accurate.