Li, X. (2023). Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation. Linköping: Linkopings Universitet.
Chicago Style CitationLi, Xiao. Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering By Employing Metal Ion Irradiation. Linköping: Linkopings Universitet, 2023.
MLA CitationLi, Xiao. Toward Energy-Efficient Physical Vapor Deposition: Routes for Replacing Substrate Heating During Magnetron Sputtering By Employing Metal Ion Irradiation. Linköping: Linkopings Universitet, 2023.
Warning: These citations may not always be 100% accurate.