Table of Contents: A Study of Group 13-Nitride Atomic Layer Deposition :

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A Study of Group 13-Nitride Atomic Layer Deposition : Computational Chemistry Modelling of Atomistic Deposition Processes.

Bibliographic Details
Main Author:	Rönnby, Karl.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2023.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Dissertations Series
Subjects:	Electronic books.
Online Access:	Click to View

Table of Contents:

Intro
Abstract
Populärvetenskaplig sammanfattning
Preface
Acknowledgments
List of Papers Included in the Thesis
List of Relevant Papers not Included in the Thesis
List of Abbreviations
Table of Contents
Chapter 1 - Introduction
Chapter 2 - Vapor Deposition Techniques
Chapter 3 - Modelling of ALD
Chapter 4 - Quantum Chemical Modelling
Chapter 5 - Statistical Thermodynamics and Kinetics
Chapter 6 - Contributions to The Field
Chapter 7 - Outlooks and Future Aspects
References
Papers.