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|a Rönnby, Karl.
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|a A Study of Group 13-Nitride Atomic Layer Deposition :
|b Computational Chemistry Modelling of Atomistic Deposition Processes.
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|a 1st ed.
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|a Linköping :
|b Linkopings Universitet,
|c 2023.
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|c {copy}2023.
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| 300 |
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|a 1 online resource (98 pages)
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| 336 |
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
|b cr
|2 rdacarrier
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|a Linköping Studies in Science and Technology. Dissertations Series ;
|v v.2295
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|a Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgments -- List of Papers Included in the Thesis -- List of Relevant Papers not Included in the Thesis -- List of Abbreviations -- Table of Contents -- Chapter 1 - Introduction -- Chapter 2 - Vapor Deposition Techniques -- Chapter 3 - Modelling of ALD -- Chapter 4 - Quantum Chemical Modelling -- Chapter 5 - Statistical Thermodynamics and Kinetics -- Chapter 6 - Contributions to The Field -- Chapter 7 - Outlooks and Future Aspects -- References -- Papers.
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|a Description based on publisher supplied metadata and other sources.
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| 590 |
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|a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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| 655 |
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|a Electronic books.
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|i Print version:
|a Rönnby, Karl
|t A Study of Group 13-Nitride Atomic Layer Deposition
|d Linköping : Linkopings Universitet,c2023
|z 9789180750721
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| 797 |
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|a ProQuest (Firm)
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| 830 |
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|a Linköping Studies in Science and Technology. Dissertations Series
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| 856 |
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|u https://ebookcentral.proquest.com/lib/matrademy/detail.action?docID=30400991
|z Click to View
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