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03837nam a22003853i 4500 |
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EBC6811601 |
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231204s2021 xx o ||||0 eng d |
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|a 9783658359263
|q (electronic bk.)
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|z 9783658359256
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|a (MiAaPQ)EBC6811601
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|a (Au-PeEL)EBL6811601
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|a (OCoLC)1321791975
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|a MiAaPQ
|b eng
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|e pn
|c MiAaPQ
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|a TA1671-1707
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|a Taudt, Christopher.
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|a Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry.
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|a 1st ed.
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|a Wiesbaden :
|b Springer Vieweg. in Springer Fachmedien Wiesbaden GmbH,
|c 2021.
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|c ©2022.
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|a 1 online resource (180 pages)
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|a text
|b txt
|2 rdacontent
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|a computer
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|2 rdamedia
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|a online resource
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|a Intro -- Acknowledgements -- Abstract -- Contents -- List of Symbols -- List of Figures -- List of Tables -- 1 Introduction and Motivation -- 2 Related Works and Basic Considerations -- 2.1 Profilometry -- 2.1.1 Atomic Force Microscopy -- 2.1.2 Confocal Laser Scanning Microscopy -- 2.1.3 Digital Holographic Microscopy -- 2.1.4 Phase-shifting Interferometry -- 2.1.5 Coherence Scanning Interferometry -- 2.1.6 Low-coherence Interferometry -- 2.2 Polymer Cross-linking Characterization -- 2.2.1 Soxhlet-type Extraction -- 2.2.2 Differential Scanning Caliometry -- 2.2.3 Dynamic Mechanical Analysis -- 2.2.4 Spectroscopy-based Methods -- 2.2.5 Low-coherence Interferometry and Other Optical Methods -- 2.2.6 Spatially-resolved Approaches -- 2.3 Film Thickness Measurement -- 2.3.1 Spectral Reflectometry -- 2.3.2 Spectroscopic Ellipsometry -- 2.4 Material dispersion -- 2.4.1 Thermo-optic coefficient -- 2.4.2 Photo-elastic influences -- 2.4.3 Characterization of dispersion -- 3 Surface Profilometry -- 3.1 Experimental Setup -- 3.2 Measurement Range and Resolution -- 3.3 Signal Formation and Analysis -- 3.3.1 Fitting of Oscillating Data -- 3.3.2 Frequency Analysis -- 3.3.3 Two-Stage Fitting -- 3.3.4 Error Estimation of the Data Processing -- 3.4 Two-Dimensional Approach and Characterization -- 3.4.1 Height Standard Evaluation -- 3.4.2 Repeatability and Resolution Characterization -- 3.4.3 Edge Effects -- 3.4.4 Roughness Evaluation -- 3.4.5 High-Dynamic Range Measurements -- 3.4.6 Dual-Channel Approach -- 3.5 Areal Measurement Approaches -- 3.5.1 Translation-Based Areal Information -- 3.5.2 Alternative Spectral Encoding for Areal Measurements -- 4 Polymer Characterization -- 4.1 Temporal Approach -- 4.2 Scan-free Approach -- 4.2.1 Wrapped-phase Derivative Evaluation (WPDE) -- 4.2.2 Spatially-resolved Approaches -- 4.3 Influences and Limitations.
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|a 4.3.1 Error Parameters of the Temporal Approach -- 4.3.2 Error Propagation in WPDE -- 5 Thin-film Characterization -- 5.1 Setup Considerations -- 5.2 Characterization of Thin-films on Bulk Substrates -- 5.3 Characterization of Flexible Substrate Materials -- 6 Conclusion -- A Glossary -- Publications -- Bibliography.
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|a Description based on publisher supplied metadata and other sources.
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|a Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2023. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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|a Electronic books.
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|i Print version:
|a Taudt, Christopher
|t Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
|d Wiesbaden : Springer Vieweg. in Springer Fachmedien Wiesbaden GmbH,c2021
|z 9783658359256
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|a ProQuest (Firm)
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|u https://ebookcentral.proquest.com/lib/matrademy/detail.action?docID=6811601
|z Click to View
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