Table of Contents: Fluorinated SiC CVD.

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Fluorinated SiC CVD.

Bibliographic Details
Main Author:	Stenberg, Pontus.
Format:	eBook
Language:	English
Published:	Linköping : Linkopings Universitet, 2017.
Edition:	1st ed.
Series:	Linköping Studies in Science and Technology. Dissertations Series
Subjects:	Electronic books.
Online Access:	Click to View

Table of Contents:

Intro
ABSTRACT
POPULÄRVETENSKAPLIG SAMMANFATTNING
PAPERS INCLUDED IN THE THESIS
MY CONTRIBUTION TO THE PAPERS
ACKNOWLEDGMENT
CONTENTS
CHAPTER 1 INTRODUCTION
CHAPTER 2 SILICON CARBIDE
CHAPTER 3 GROWTH METHODS
CHAPTER 4 THE HORIZONTAL HOT WALL CVD REACTOR
CHAPTER 5 EFFECT OF RELATED PROCESS PARAMETERS
CHAPTER 6 MODELLING
CHAPTER 7 CHARACTERIZATION
CHAPTER 8 FUTURE WORK
REFERENCES
SUMMARY OF THE INCLUDED PAPERS.