High resolution 3D nanoimprint technology template fabrication, application in Fabry-Perot-filter-based nanospectrometers /
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| Format: | Thesis Electronic eBook |
| Language: | English |
| Published: |
Kassel [Germany] :
Kassel University Press,
2011.
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| Online Access: | Click to View |
| Item Description: | Summary in German. |
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| Physical Description: | iii, 160 p. : ill. (chiefly col.) |
| Bibliography: | Includes bibliographical references. |