High Temperature Behavior of Arc Evaporated ZrAlN and TiAlN Thin Films.
| Main Author: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2012.
|
| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
|
| Subjects: | |
| Online Access: | Click to View |
| Physical Description: | 1 online resource (104 pages) |
|---|---|
| ISBN: | 9789175199566 |