A Quantum Chemical Exploration of SiC Chemical Vapor Deposition.
| Main Author: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Linköping :
Linkopings Universitet,
2017.
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| Edition: | 1st ed. |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Subjects: | |
| Online Access: | Click to View |
Table of Contents:
- Intro
- Abstract
- Sammanfattning
- Acknowledgement
- List of included publications
- Table of Contents
- Chapter 1 Introduction
- Chapter 2 Quantum Chemical Calculations
- Chapter 3 Quantum Chemistry in CVD Modeling
- Chapter 4 Results and Summary
- References.