Nonstoichiometric Multicomponent Nitride Thin Films.

Bibliographic Details
Main Author: Shu, Rui.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2020.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Licentiate Thesis Series
Subjects:
Online Access:Click to View
Table of Contents:
  • Intro
  • Abstract
  • Preface
  • Included papers
  • Acknowledgement
  • Table of Contents
  • 1. Introduction
  • 2. Thin Film Deposition and Growth
  • 3. Characterization of Thin Films
  • 4. Characterization of Properties
  • 5. Main Results and Contribution to the Field
  • 6. Future Work
  • Bibliography
  • Papers.