Surface-Controlled Chemical Vapor Deposition of Silicon Carbide.

Bibliographic Details
Main Author: Huang, Jing-Jia.
Format: eBook
Language:English
Published: Linköping : Linkopings Universitet, 2022.
Edition:1st ed.
Series:Linköping Studies in Science and Technology. Dissertations Series
Subjects:
Online Access:Click to View
Table of Contents:
  • Intro
  • Abstract
  • Svensk Sammanfattning
  • 文摘
  • Acknowledgement
  • List of Articles
  • Table of Contents
  • 1 Introduction
  • 2 Chemical Vapor Deposition
  • 3 Surface-Controlled Chemical Vapor Deposition
  • 4 Silicon Carbide
  • 5 Characterization Techniques
  • 6 Contribution to the Field
  • 7 Outlook
  • References
  • Papers.