Surface-Controlled Chemical Vapor Deposition of Silicon Carbide.
Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
Linköping :
Linkopings Universitet,
2022.
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Edition: | 1st ed. |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Subjects: | |
Online Access: | Click to View |
Table of Contents:
- Intro
- Abstract
- Svensk Sammanfattning
- 文摘
- Acknowledgement
- List of Articles
- Table of Contents
- 1 Introduction
- 2 Chemical Vapor Deposition
- 3 Surface-Controlled Chemical Vapor Deposition
- 4 Silicon Carbide
- 5 Characterization Techniques
- 6 Contribution to the Field
- 7 Outlook
- References
- Papers.