Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. - Hänninen, Tuomas (Linköping : Linkopings Universitet, 2018)
Intro -- Abstract -- Populärvetenskaplig sammanfattning -- Preface -- Acknowledgements -- Introduction -- Purpose and outline -- Silicon nitride and silicon nitride-based materials -- Silicon nitride -- Silicon oxynitride -- Silicon carbonitride -- Thin film deposition and process characterization -- Magnetron sputtering -- High power impulse magnetron sputtering -- Reactive sputtering -- Sputtering with different reactive gases -- Plasma characterization -- Langmuir probe measurements -- Mass spectrometry -- Experimental details of thin film deposition -- Thin film characterization -- X-ray photoelectron spectroscopy -- Elastic recoil detection analysis -- X-ray reflectivity -- Raman spectroscopy -- Transmission electron microscopy -- Residual stress measurement -- Nanoindentation -- Spectroscopic ellipsometry -- Summary of included publications -- Bibliography -- Included publications and author's contribution.
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Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Keywords: Electronic books