Hänninen, T. (2018). Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. Linköping: Linkopings Universitet.
Chicago Style CitationHänninen, Tuomas. Silicon Nitride Based Coatings Grown By Reactive Magnetron Sputtering. Linköping: Linkopings Universitet, 2018.
MLA CitationHänninen, Tuomas. Silicon Nitride Based Coatings Grown By Reactive Magnetron Sputtering. Linköping: Linkopings Universitet, 2018.
Warning: These citations may not always be 100% accurate.