APA Citation

Hänninen, T. (2018). Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering. Linköping: Linkopings Universitet.

Chicago Style Citation

Hänninen, Tuomas. Silicon Nitride Based Coatings Grown By Reactive Magnetron Sputtering. Linköping: Linkopings Universitet, 2018.

MLA Citation

Hänninen, Tuomas. Silicon Nitride Based Coatings Grown By Reactive Magnetron Sputtering. Linköping: Linkopings Universitet, 2018.

Warning: These citations may not always be 100% accurate.